🔬 Microsystems (MEMS) Map of Content
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1. Fundamentals
- Scaling_Laws (Physics at micro-scale)
- Fabrication environment (Contamination Control)
2. Fabrication
- Microfabrication (Lithography, Etching, Deposition)
- Materials_MEMS (Silicon, glass, polymers)
- Thin films
- Thin films deposition
3. Devices
- Micro_Sensors (Pressure, Acceleration, Gyroscopes)
- Micro_Actuators (Electrostatic, Thermal, Piezoelectric)
Related Fields: Electrical Engineering MOC, Physics MOC, Material Science MOC