1. Definition
Microsystem: sensor actuator, data treatment with interface to the outside
1 - 100 um (smaller than human hair)
Transform signal from one domain to another domain (physical quantity ↔ electrical)
Electrical, mechanical, magnetic, optic
Combination of microsystems and multiple engineering fields
Why microsystems
Limited space available
Lighter→ less inertia→ short reaction times
Less energy
Production technologies do not allow to fabricate macroscopic systems
2. Components
3. Examples of microsystems
Human like sense of touch with capacitor membrane
Digital-matrix-led (micromirror device) Immunosensor (detect certain chemical elements responsible for disease)
Microfluidic system
4. Important points
Special environement
Special materials
Special processes